Fabrication of GaAs/AlGaAs Quantum Well Lasers with MeV Oxygen Ion Implantation
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چکیده
منابع مشابه
FABRICATION OF GaAs/ AlGaAs QUANTUM WELL LASERS WITH MeV OXYGEN ION IMPLANTATION*
Me V oxygen ion implantation in GaAs/ AlGaAs has been shown to provide a simple and very promising technique for quantum well laser fabrication. A lOμm stripe single quantum well (SQW) graded-index separation confinement heterostructure (GRINSCH) laser made in this way has achieved high performance with high quantum differential efficiency, low threshold current and good electrical isolation ch...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 1988
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-144-367